| Since 2004, TSMC has succeeded to ramp the
NexsysSM 90nm process in TSMC's
state-of-the-art 12-inch fab, Fab12, located in Hsinchu, Taiwan.
In 2005, TSMC has also completed to qualify Fab14 in Tainan. There
are hundreds of product tape-outs and hundreds of thousands 12
wafer shipment since first tape-out. And TSMC develops DFM to help
Customers achieve better yield performance thru volume production
data. TSMC boasts a significant advantage in its combination of
90nm process technology with 12-inch wafers, which produces significant
economic gains. In addition, the half node process 80GC (1.0/3.3V)
was also released in Q4, 2006. 80GC can achieve better standby and
active power than 90G while reducing die area by more than 10%,
depending on the non-shrinkable IP module ratio. 80GC can be used
in many product applications including consumer, network and computer
product segments
NexsysSM technology satisfies
the power, performance and integration requirements of a broad spectrum
of applications and includes high-performance, low-power, mixed-signal/RF,
embedded DRAM, and non-volatile memory options. TSMC established
the NexsysSM brand for its next-generation
SoC process technology platform. The company's 90-nm technology
is the first TSMC process to adopt this brand. NexsysSM
offers a unique triple gate oxide option that facilitates three
different oxide thicknesses on a single chip. The triple gate oxide
feature removes design restrictions caused by various core/IO combination
requirements and should lead to more innovative SoC designs. With
70-75% linear shrinkage and a 2X performance improvement, compared
to TSMC's 0.13-Micron technology, NexsysSM
is poised to become the de-facto SoC process technology platform
standard.
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The 90-nm process technology
features: |
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Core supply voltage ranging
from 1.0V to 1.2V |
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I/O and analog blocks ranging from
1.8V to 3.3V |
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Multiple threshold voltage (Vt) option
for optimized transistor speed and power consumption trade-offs
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Extremely tight process control for
50-nanometer gate length - the high speed process |
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Ni-salicide for better sheet resistance
(Rs) in narrow line widths |
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Nine-layer copper interconnect, with
an extra redistribution layer optional for flip-chip package
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Low-k dielectrics with k less than
2.9 for the lowest RC delay and power consumption |
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NexsysSM
mixed signal/RF process features: |
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MiM capacitor |
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High resistance resistor |
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High Q inductor and varactor |
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DNW(deep N well) bipolar junction transistor
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